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題名 | 奈米探針工程技術於掃描探針顯微術之應用=Applications of Nano-probe Engineering on Scanning Probe Microscopy |
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作者姓名(中文) | 張茂男; 古硯涵; 游明翰; | 書刊名 | 奈米通訊 |
卷期 | 19:4 2012.12[民101.12] |
頁次 | 頁9-16 |
分類號 | 448.57 |
關鍵詞 | 高深寬比探針; 前翼懸臂; 掃描電容顯微鏡; 原子力顯微鏡; High-aspect-ratio probe; Front-wing cantilever; Scanning capacitance microscopy; Atomic force microscopy; |
語文 | 中文(Chinese) |
中文摘要 | 奈米探針在掃描探針顯微術中扮演著十分關鍵的角色,探針懸臂與針尖的物理與化學特性,對所取得的掃描影像性質有著直接的影響,奈米探針工程技術主要用以改善或改變奈米探針的功能與特性,以進一步提升掃描探針顯微術的檢測分析能力。本文將介紹三類探針工程技術的應用,包括高深寬比類鑽碳針尖、奈米金屬球團探針以及前翼式懸臂。對原子力顯微術而言,利用探針尖端的修飾技術,可以反覆利用鈍化的舊探針,同時可以將其加工成高深寬比的尖銳針尖,可用於高深寬比結構的高解析分析;透過在探針針尖的吸附奈米金屬球團製作技術,可以抑制場感測分析時的雜散場效應,提高所取得影像的解析度;對於電性掃描探針顯微術而言,前翼式懸臂探針可以明顯抑制掃描時的光擾效應,使取得的電性訊號更加穩定可靠。 |
英文摘要 | Nano-probes play a key role in scanning probe microscopy (SPM). The physical and chemical properties of the cantilever and the tip of a probe directly affect the image quality obtained by SPM. Nano-probe engineering can improve or change functions and properties of a nano-probe for further enhancing SPM measurements. In this report, we introduced three kinds of applications about nano-probe engineering, including a high-aspect-ratio (HAR) diamond-like-carbon tip apex, a metal nano-cluster probe as well as a front-wing cantilever. For atomic force microscopy, using tip apex modification can reuse a dulled tip and obtain a HAR sharp tip for high-resolution analysis on HAR structures, improving the probe performance. The process of a metal nano-cluster at a tip apex can suppress stray field effect during field-sensitive SPM measurements, increasing the spatial resolution of the obtained images. For electrical SPM, a front-wing cantilever can significantly suppress photoperturbations during measurements, resulting in reliable signals. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。