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題名 | 直立陣列碳奈米管成長參數之研究=Effects of Process Parameters on the Growth of Aligned Carbon Nanotubes |
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作者姓名(中文) | 王春田; 唐炯文; 馬廣仁; 陳貴賢; 林麗瓊; | 書刊名 | 中正嶺學報 |
卷期 | 30:1 2001.10[民90.10] |
頁次 | 頁105-114 |
分類號 | 448.57 |
關鍵詞 | 直立陣列碳奈米管; 原子力顯微鏡; 穿透式電子顯微鏡; Aligned carbon nanotube; Atomic force microscope; Scanning electron microscope; |
語文 | 中文(Chinese) |
中文摘要 | 本研究以化學氣相沉積法成長直立陣列碳奈米管,使用乙炔氣體與觸媒(鐵)在高溫下產生化學反應合成直立陣列碳奈米管。實驗中發現各項製程參數如觸媒的成份濃度、操作溫度、保護或反應氣體流量、作用時間、試片前處理等,都會對碳奈米管在整體形貌與性質上造成不同程度的影響。本實驗中形貌與結構是利用原子力顯微鏡(atomic force microscope,AFM)、場發射掃描式電子顯微鏡(field emission scanning electron microscope,FESEM)及高解析度穿透式電子顯微鏡(high resolution transmission electron microscope,HRTEM)進行分析。實驗結果顯示,當觸媒濃度0.02M、溫度775 ℃、乙炔流量2.5 sccm及反應時間5分鐘時,直立陣列碳奈米管的成長況最佳。 |
英文摘要 | The aligned carbon nanotube plays a very important role in its application as a field emission source or in other one-dimensional nano devices. In the present research, aligned carbon nanotubes were synthesized by thermal chemical vapor deposition using acetylene as the source gas and iron as the catalyst. The overall appearance and nature of the aligned carbon nanotube are affected by different variables in the process such as the concentration of the catalyst, the operation temperature, the flow rate of the carrier or reaction gas, the reaction time, the pre-treatment, et cetera. Microstructural analyses were done by atomic force microscope, field emission scanning electron microscope and high resolution transmission electron microscope. Growth of aligned carbon nanotube with optimal microstructure was observed when the catalyst concentration was controlled at 0.02M, temperature at 775 degrees Celsius, acetylene flow rate at 2.5 sccm, and a reaction time at 5 minutes. |
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