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題 名 | 超硬奈米複合鍍膜發展趨勢與現況=Current Status and Advances in Superhard Nanocomposite Coatings |
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作 者 | 卓廷彬; 馬寧元; 葉庭魁; 華振宇; | 書刊名 | 機械工業 |
卷 期 | 304 2008.07[民97.07] |
頁 次 | 頁56-62 |
專 輯 | 熱處理與表面處理技術專輯 |
分類號 | 472.16 |
關鍵詞 | 超硬奈米複合鍍膜; 斷裂韌性; 晶界滑動; 塑性變形; 磁控濺鍍; 電漿輔助化學氣相沉積; Superhard nanocomposite coatings; Rupture toughness; Grain boundary sliding; Plastic distortion; Magnetron sputtering; Plasma enhanced chemical vapor deposition; |
語 文 | 中文(Chinese) |
中文摘要 | 本文敘述超硬奈米複合鍍膜之新技術研發趨勢與應用,有許多不同之鍍膜技術可用於製備奈米複合鍍膜,反應性磁控濺鍍、電漿輔助化學氣相沉積法PECVD與過濾式陰極電弧皆為常用的方法。本文將簡介超硬奈米複合鍍膜之設計概念、鍍膜硬度與斷裂靭性之量測,微結構之最佳設計可得到超硬奈米複合薄膜。複合式(Hybrid)PVD鍍膜系統是發展超硬奈米複合鍍膜的一個新趨勢。 |
英文摘要 | This paper describes the R&D trends and applications of the new technologies of the superhard nanocomposite coatings. Various deposition technologies could be applied to prepare the nonacomposite coatings. Reactive magnetron sputtering、plasma enhanced chemical vapor deposition (PECVD) and filtering cathode arc processes are the most widely applied methods. This paper will briefly introduce the design concepts of the superhard nanocmposite coatings as well as the measurements of the hardness and rupture toughness of the coating films. Superhard nanocomposite could be obtained from the optimized design of the microstructure and hybrid PVD coating system will be the new trend for the development of the superhard nanocomposite coatings. |
本系統中英文摘要資訊取自各篇刊載內容。