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頁籤選單縮合
題名 | Growth of Highly C-axis Oriented AlN Films on GaAs Substrates=在砷化鎵基板上沈積高C軸排向氮化鋁薄膜 |
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作者 | 洪榮昌; 鄭建銓; Horng, Rong-chang; Cheng, Chien-chuan; |
期刊 | 四海學報 |
出版日期 | 199805 |
卷期 | 12 1998.05[民87.05] |
頁次 | 頁127-141 |
分類號 | 448.57 |
語文 | eng |
關鍵詞 | 沈積; 高C軸排向氮化鋁薄膜; 反應性射頻磁控濺鍍法; 砷化鎵基板; C-axis oriented; Aluminum nitride; Reactive rf magnetron sputtering; X-ray diffraction; Preferred orientation; Scanning electron microscopy; |