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題名 | Effects of Different Diluted PH-Value Solution on Gd Oxide by Using Anodic Oxidation Method=利用陽極氧化製備釓金屬氧化物於不同酸鹼溶液中所呈顯的各種效應 |
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作者 | 陳晉毅; 黃琪聰; 陳孟吟; 柯鴻禧; Chen, Jin-yi; Huang, Chi-tsung; Chen, Meng-yin; Lin, Che-ping; Hu, Chih-chan; Ko, Hong-hsi; |
期刊 | 南開學報 |
出版日期 | 20071200 |
卷期 | 4:4 2007.12[民96.12] |
頁次 | 頁51-57 |
分類號 | 368.7 |
語文 | eng |
關鍵詞 | 陽極氧化; 氧化釓; 堆疊結構; 粗糙度; Anodic oxidation; Gadolinium oxide; PH-value; Crystalline structure; Linear factor; Surface roughness; Sensitivity; |
中文摘要 | 本研究利用陽極氧化方法於室溫下,製備氧化釓/二氧化矽/矽 堆疊結構之試片,作為溶液及體液酸鹼度之測定,量測之結果獲得如下幾點重要結論: (1)溶液的酸鹼值愈高,試片受蝕刻後其表面粗糙度愈大。 (2)溶液的酸鹼值愈偏向酸性,試片上氧化物被蝕刻掉的厚度愈大。 (3)溶液愈呈酸性,電容-電壓特性曲線的分佈將以大約56.72mV/pH的比例逐漸向右偏移。 (4)於電容-電壓特性曲線上固定在相同的電容值時,每條特性曲線的電壓線性指數大約99.98%,接近理想狀態。 由此研究結果,可知三氧化二釓氧化物很適合用在酸鹼液中來做為溶液酸鹼度之感測,甚至亦可應用在人體血液、尿液及唾液或體液等生醫方面的量測,以作為各種疾病併發症狀的研判。 |
英文摘要 | This research exposes the growth of Gadolinium (Gd) oxide by anodic oxidation method, which can be applied to the etching test of different pH-value solution. Each sample immersed in different pH-value diluted solution shows the different thickness varied from 11.2 nm to 6.2 nm respectively after a transmission electronic microscope(TEM) examination The etched samples still have remained both two crystalline structures and four crystal phases by by an X-ray diffraction (XRD) measurement.After etching, the surface roughness (Ra) is decreased from 1.042 nm to 0.198 nm after an atomic force microscope (AFM) examination. In addition,the C-V curves for every sample have a ratio right shift by a C-V measurement and the slope was around 56.72mV/pH. The linear factor under the variations of the voltage obtained while fixing in the same capacitance is 99.98%, Which is much closed to ideal case. The experiment results show that Gd oxide has very high sensitivity to the different pH-value liquids and presents the interdependent relation with the pH value of etching solution. |
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