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頁籤選單縮合
題名 | On the Hardness and Microstructure of AIN Thin Films Prepared by Long-Distance Reactive Magnetron Sputtering=干涉磁控濺鍍系統成長氮化鋁薄膜硬度與微結構之研究 |
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作者姓名(中文) | 李縫治; 趙健祥; 黃興祿; 朱安國; | 書刊名 | 中國機械工程學刊 |
卷期 | 26:6 民94.12 |
頁次 | 頁773-778 |
分類號 | 472.16 |
關鍵詞 | 磁控濺鍍系統; 氮化鋁薄膜; Aluminum nitride; Morphology; Coherent sputtering; Microstructure; Hydrophobicity; |
語文 | 英文(English) |