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題名 | Effect of Mechanical Stress on Current-Voltage Characteristics of Chemical Vapor Deposited Diamond and Aluminum Nitride Thin Films=鑽石和氮化鋁薄膜的壓電效應 |
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作者 | 廖本瑜; Liaw, Been-yu; |
期刊 | 吳鳳學報 |
出版日期 | 19960500 |
卷期 | 4 1996.05[民85.05] |
頁次 | 頁11-19 |
分類號 | 448.532 |
語文 | eng |
關鍵詞 | 化學汽相沉積法; 鑽石和氮化鋁薄膜; 蕭基二極體; 壓電轉換器; Chemical vapor deposited; Diamond; Aluminum nitride; Schottky diode; Mechanical transducer; Silicon; Germanium; |
中文摘要 | 化學汽相沉積法合成的鑽石和氮化鋁薄膜,具有很多獨特且優異的特性。當我們 在測量其電流特性時,意外地發現它們具有很好的壓電效應。傳統以矽為原料製成的壓電元 件,往往無法在特殊惡劣的工作環境下繼續正常地工作,而鑽石和氮化鋁結合了它們在光學 ,電性及機械上獨特的特性,使得它們成為最有潛力取代矽元素製成的壓感元件。 在本篇論文中,以鑽石和氮化鋁作成的蕭基二極體來測試其壓電效應。實驗結果證實這些元 件具有很好且可重覆的壓電效應,可做為實用的壓電轉換器。其靈敏度更可在不改變任何硬 體裝置的情況下,藉由選擇合適的偏壓電流來達到調整的目的。 |
英文摘要 | Chemical vapor deposited (CVD) diamond and aluminum nitride (AIN) thin films were studied for the relationship between the applied mechanical stress and the changes of the electrical characteristics. Diamond and AIN Schottky diodes were used for the measurements. During the measurement of current-voltage characteristics on the diamond and AIN films, we found that results were affected by the probing force. The results indicated that a linear relationship was found between applied voltage and stress of force. These stress-induced linear relationship were reversible within the investigated range. Also, we found that the sensitivity of the force sensor can be conveniently adjusted by selecting the proper bias current without change any physical setup. Combine these excellent properties indicated that Chemical Vapor Deposited (CVD) diamond and AIN based devices have potential for mechanical transducer applications. This mechanical stress effect on current-voltage characteristics has been observed in silicon and germaniom junction diodes. Due to the vulnerability to damage when high stress was applied, only limited silicon and germanium based applications are possible. Diamond and AIN which have high hardness, chemical resistance, and low thermal expansion may be a promising substitute for silicon and germanium force sensor applications, especially those requiring operation in harsh environments. |
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