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頁籤選單縮合
題名 | Temperature Effect on the AIN/SiO[feaf] Gate pH-ISFET Devices=氮化鋁離子感測場效電晶體之溫度效應 |
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作者 | 賈維國; 江榮隆; | 書刊名 | 和春學報 |
卷期 | 10 民92.07 |
頁次 | 頁47-54 |
分類號 | 448.552 |
關鍵詞 | 氮化鋁離子感測場效電晶體; 溫度; 氮化鋁薄膜; Aluminum nitride; AlN; ISFET; Sputtering; Temperature coefficient; Constant voltage constant current; CVCC; |
語文 | 英文(English) |