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題 名 | Study of the pH-ISFET and EnFET for Biosensor Applications=酸鹼離子感測與酵素感測元件應用於生醫感測之研究 |
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作 者 | 江榮隆; 周榮泉; 陳英忠; | 書刊名 | Journal of Medical and Biological Engineering |
卷 期 | 21:3 2001.09[民90.09] |
頁 次 | 頁135-146 |
分類號 | 410.1644 |
關鍵詞 | 氮化鋁; 非晶形三氧化鎢; 離子感測場效電晶體; 分離式結構; 生醫感測器; AIN; a-WO[feb0]; ISFET; Separative structure; Biosensor; |
語 文 | 英文(English) |
中文摘要 | 許多感測材料(例如:氮化鋁、非晶形三氧化鎢、非晶形矽氫、鈦酸鉛、氧化鋁、氧化鉭、氮化矽、氧化錫...等)已經被研究且應用於酸鹼離子感測場效電晶體(pH-ISFET)元件上。在此論文由相關文獻中,我們報告氮化鋁、鈦酸鉛、氧化鋁、氧化鉭、氮化矽、和氧化錫可以分別在酸鹼溶液中(pH1~12)進行感測,而非晶形三氧化鎢與非晶形矽氫則可於酸性溶液中(pH1~7)進行感測。此外,在此論文中我們亦提出一種新型分離式結構的延伸閘極場效電晶體(EGFET),此結構是一種改良式延伸閘極場效電晶體,而氧化錫被當成此結構中的感測膜,同時並將酵素固定在氧化錫薄膜上,應用於生醫感測器(biosensor)中。 |
英文摘要 | There are several sensing materials (such as: AlN, a-WO3, a-Si:H, PbTiO3, Al2O3, Ta2O5, Si3N4, SnO2...) have been investigated and applied for the pH-ISFET devices. In this review article, we report that the AlN, PbTiO3, Al2O3, Ta2O5, Si3N4 and SnO2 can be detected in the pH=1~12, and the a-WO3 and a-Si:H were applied in acid buffer solutions (pH=1~7). In addition, we introduced a novel separative structure of EGFET, this structure is an improvement of extended gate structure ISFET, and the tin oxide thin film (SnO2) was prepared as a pH sensing membrane and firstly immobilized the enzyme on the tin oxide pH-sensitive film for the biosensor application. |
本系統中英文摘要資訊取自各篇刊載內容。