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題名 | 熱退火對混合膜與漸變折射率皺波型濾光片之影響研究=Effects of Thermal Annealing on the Composite Films and Graded-index-like Rugate Filters |
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作者 | 唐謙仁; 江政忠; 李正中; | 書刊名 | 真空科技 |
卷期 | 24:2 2011.06[民100.06] |
頁次 | 頁62-70 |
分類號 | 448.59 |
關鍵詞 | 混合膜; 漸變折射率皺波型濾光片; 射頻離子束濺鍍; 熱退火; 殘留應力; Composite thin films; Graded-index-like rugate filters; RF ion-beam sputtering; Thermal annealing; Residual stress; |
語文 | 中文(Chinese) |
中文摘要 | 利用射頻離子束濺鍍系統製鍍 Ta2O5-SiO2 混合膜及漸變折射率皺波型濾光片,並探討單層 Ta2O5-SiO2 混合膜及不同膜層結構之漸變折射率皺波型濾光片於熱退火前後之光學常數及殘留應力之變化,結果顯示使用 Ta2O5-SiO2 混合膜所製鍍之準漸變折射率皺波型濾光片較使用純 Ta2O5 及 SiO2 兩種高低折射率材料交替堆疊之光學多層干涉濾光片於熱退火前後皆具有良好的光學特性、低殘留應力及高的熱穩定性。 |
英文摘要 | Composite fi lms of Ta–Si oxide and graded-index-like fi lms have been realized by using radiofrequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of fi lms were more stable than that of the notch fi lters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing. |
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