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頁籤選單縮合
題名 | 以微流道為例探討不同製程方式之研究=Study on Different Processing Methods for Microchannel Case |
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作 者 | 沈永康; 洪榮宏; | 書刊名 | 龍華科技大學學報 |
卷期 | 23 2007.09[民96.09] |
頁次 | 頁1-10 |
分類號 | 448.57 |
關鍵詞 | 微熱壓成形; 微細磨料噴射加工; 表面粗糙度; 微流道; 單一變數法; Micro hot embossing; Micro powder blasting; Surface roughness; Micro channel; Singular method; |
語文 | 中文(Chinese) |
中文摘要 | 本文以微流道為例,針對不同材質模仁於微熱壓成形以及微細磨料噴射加工進行研究。在金屬模仁製作部分,首先在矽晶圓塗佈上SU-8負光阻,經由UV光將光罩的圖形轉移在SU-8光阻上,接著熱蒸鍍上一層種子層,再結合微電鑄技術,製作出鎳、銅、鎳-鈷三種材質模仁及經由曝光顯影再配合ICP深蝕刻技術得到矽材質模仁。最後使用微熱壓成形機進行微熱壓成形在COP薄膜上之研究,並利用AFM探討不同製程參數與不同材質模仁對於微流體晶片表面粗糙度的影響對成品品質影響。此外本研究以於蘇打玻璃基材(soda glass)上製作微流道,寬度為100μm,深度為60-140μm微流道。本研究以直徑30μm之氧化鋁(Al₂O₃)為微細磨料粒子,對於不同因子(磨料噴射壓力、噴嘴/基材距離、屏罩材料等)之製程參數,使用單一變數法尋找製作微流道之最佳化製程參數。 實驗結果顯示,在微熱壓實驗中,影響粗糙度最重要的製程參數為脫模溫度;於微細磨料噴射加工中微流道之深度隨著磨料噴射壓力增大而增加,而微流道之深度隨著噴嘴/基材距離增加而減少。本研究以微細磨料噴射加工所製作之微流道僅需50秒左右,而傳統以半導體蝕刻約需幾天,在時效上較為快速。 |
英文摘要 | This study uses the micro channel as example to discuss the different materials of mold insert by hot embossing molding and uses the powder blasting to fabrication. For the mold insert, firstly, this study uses the SU-8 photoresist to coat on the silicon wafer, then uses the UV light to expose the pattern on the surface of SU-8 photoresist, and uses the thermal evaporation to coat the seed layer on SU-8 structure. This study combines the micro electroforming technology to fabricate the mold inserts (Ni, Cu, Ni-Co). Finally, this study user the micro-hot embossing molding to replicate the micro structure from the metal mold insert. This study uses AFM to measure the surface roughness of micro channel. The de-molding temperature is most important parameter for surface roughness. In addition, the contribution is based on soda, glass, and fabricating micro channel by power blasting. The micro channel width is 100up, the depth is 60-140up。We using 30m diameter A1₂O₃ particle on powder blasting. The paper uses the singular methods to discuss different processing parameters (injection pressure, nozzle/base distance, mask material) for the properties of micro channel. The paper use to discuss the properties of the de-molding temperature is most important parameter for surface roughness. In the powder blasting, the channel depth increases as injection pressure increases, and follow on nozzle/base distance increase to cut down. It only waste approximately 50 seconds by using the powder blasting fabrication micro channel faster than using by traditional microelectromechanical systems. |
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