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題 名 | 晶粒大小對化學氣相沉積硫化鋅機械性質之影響=Effect of Grain Size on the Mechanical Properties of CVD-ZnS |
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作 者 | 張晴生; 何主亮; 林宗平; | 書刊名 | 陶業學刊 |
卷 期 | 3:1 1999.01[民88.01] |
頁 次 | 頁1-9 |
分類號 | 440.33 |
關鍵詞 | 硫化鋅; 化學氣相沉積; 機械性質; 固體顆粒衝擊; Zinc sulfide; Chemical vapor deposition; Mechanical properties; Solid particle impingement; |
語 文 | 中文(Chinese) |
中文摘要 | 實際應用上,光窗材料除了要滿足透光性之外,也必需要求適當的機械性質。因 為航空器飛行時,其光窗會面臨磨蝕(Erosion)環境。利用化學氣相沈積法(Chemical vapor deposition, CVD)製備代表性的ZnS紅外線穿透材料,具有高純度與緻密性的沈積物、亦可 生長大面積及幾何形狀複雜的塊材。並可藉由製程參數的調整來控制沈積層的性質,而其 中生長溫度為一重要的決定性因素,它決定了晶粒大小,並進而影響穿透性和機械性質。 以往對於ZnS機械性質的探討僅及於硬度與破裂韌性的評估,對於固體顆粒衝擊(Solid particle impingement)所造成的材料流失現象與傳統機械性質之硬度或破裂韌性之間的關 聯性並無實際之驗證,故本研究利用CVD法生長多晶ZnS紅外線穿透材料。改變生長溫度取 得不同晶粒大小之試片,分析與探討其對ZnS的微觀結構及機械性質,尤其是抗固體顆粒衝 擊性之影響。 實驗結果顯示,隨生長溫度的提高,ZnS的優選方位趨向(111)方向,晶粒亦隨之增大 ,而密度則略降。晶粒大小直接影響ZnS的硬度及破裂韌性,故隨著生長溫度的提高而降低 硬度值及破裂韌性值。固體顆粒衝擊流失速率並未符合Evans的理論預測,原因可能是晶粒 尺寸遠大於細晶的均質特性範圍。粗晶有較少的晶界總面積,使得局部化、區域化的破裂 特徵限制每單位時間的流失質量,因而高溫生長的粗晶反而衝擊流失速率略小。 |
英文摘要 | Besides the high transparency requirement, mechanical properties are also important for IR windows that may suffer from erosion damage during service Zinc sulfide is a typical IR material that provide high transparency and satisfactory mechanical properties. Chemical vapor depoition, capable of producing large area and complex shape deposit with high purity and density is commonly used to deposit IR materials. Substrate temperature, determines the grain size of the deposits and hence the transparency and the mechanical properties is vital important. Reports on hardness and fracture toughness of the CVD ZnS were found without erosion test and there leaves a mystery in the effect of grain size on the real solid particle erosion rate. This study evaluates the solid particle impingement of the ZnS with different grain size deposited at different substrate temperature. The relationship between mechanical properties and grain size is discussed. Experimental results show that high substrate temperature favors the (111) texture and large grain growth. Density decreases slightly. The dominating factor that influences hardness and fracture toughness is the grain size. Solid particle erosion rate is however low for the large grain size ZnS deposited at high substrate temperature. Evans theory fail to explain the behavior probably because of the localized failure in each impact event that develops on the surface large grain size ZnS. |
本系統中英文摘要資訊取自各篇刊載內容。