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題名 | 蝕刻參數對砷化鎵之金屬輔助化學蝕刻形貌與機制的影響研究=The Influence of Etching Parameters on the Morphology and Mechanism of the Metal-assisted Chemical Etching of Gallium Arsenide |
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作者 | 陳品仰; 李昆達; Chen, Pin-yang; Li, Kun-dar; |
期刊 | International Journal of Science and Engineering |
出版日期 | 20210400 |
卷期 | 11:1 2021.04[民110.04] |
頁次 | 頁29-40 |
分類號 | 472.1 |
語文 | chi |
關鍵詞 | 表面形貌; 金屬輔助化學蝕刻; 砷化鎵; 金顆粒; Surface morphology; Metal-assisted chemical etching; Gallium arsenide; Gold nanoparticles; |