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| 題 名 | 蝕刻參數對砷化鎵之金屬輔助化學蝕刻形貌與機制的影響研究=The Influence of Etching Parameters on the Morphology and Mechanism of the Metal-assisted Chemical Etching of Gallium Arsenide |
|---|---|
| 作 者 | 陳品仰; 李昆達; | 書刊名 | International Journal of Science and Engineering |
| 卷 期 | 11:1 2021.04[民110.04] |
| 頁 次 | 頁29-40 |
| 分類號 | 472.1 |
| 關鍵詞 | 表面形貌; 金屬輔助化學蝕刻; 砷化鎵; 金顆粒; Surface morphology; Metal-assisted chemical etching; Gallium arsenide; Gold nanoparticles; |
| 語 文 | 中文(Chinese) |