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題名 | Manufacturing Intelligence for Early Warning of Key Equipment Excursion for Advanced Equipment Control in Semiconductor Manufacturing=製造智慧以建構半導體關鍵設備異常預警與先進設備控制之研究 |
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作者 | 許嘉裕; 簡禎富; 陳培穠; | 書刊名 | 工業工程學刊 |
卷期 | 29:5 2012.07[民101.07] |
頁次 | 頁303-313 |
分類號 | 494.5 |
關鍵詞 | 製造智慧; 先進設備控制; 預警; 資料挖礦; 決策樹; 良率提升; 半導體製造; 海量資料; Manufacturing intelligence; Advanced equipment control; Early warning; Data mining; Decision tree; Yield enhancement; Semiconductor manufacturing; Big data; |
語文 | 英文(English) |
英文摘要 | As feature sizes of integrated circuits are continuously shrinking in nanotechnologies, mining potentially useful information to extract manufacturing intelligence from big data automatically collected in the wafer fabrication facilities to assist in real time decisions for yield enhancement has become practically crucial to maintain competitive advantages and support intelligent manufacturing for operational excellence. Motivated by real needs, this study aims to develop an effective approach to extract manufacturing intelligence for early detection of key equipment excursion for advanced equipment control to enhance yield and reduce potential loss. For validation, an empirical study was conducted in a leading semiconductor manufacturing company to validate the proposed approach in the developed ‘‘early warning system’’ of newly released equipment to reduce tool excursion and abnormal yield loss. The results have demonstrated practical viability of the proposed approach. Indeed, the developed solution has been implemented in this company. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。