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題名 | Characterization of Graphic User Interface to an Engineering Data Analysis System in Semiconductor Fabrication=晶圓製造廠工程資料分析系統之人機介面特徵化 |
---|---|
作者 | 王俊程; 鄭友盛; | 書刊名 | 東南學報 |
卷期 | 34 2009.07[民98.07] |
頁次 | 頁55-66 |
分類號 | 448.94 |
關鍵詞 | 人機介面; 工程資料分析; 半導體製造; 良率提升; 特徵化; Graphic user interface; Engineering data analysis; Semiconductor fabrication; Yield enhancement; Characterization; |
語文 | 英文(English) |
中文摘要 | 摘 要 針對某半導體晶圓廠裡實際的工程資料分析(EDA)系統,共進行兩部份的特徵 化分析工作。首先分析其全部EDA 功能程式名稱與階層性的關鍵字詞,建構系統性名 稱特徵值與表格,此結果可以協助工程師快速搜尋所需的EDA 功能程式,進而找出生 產線良率異常的根本原因。本文主要提出特徵化的另一部份工作,探討EDA 功能程式 人機介面(GUI)的特徵。工程師使用本系統時,依其操作流程順序,檢視某程式輸入 畫面時,在輸入適當的資料後,系統顯示對應的資訊於GUI 畫面,工程師再選擇一些 選項或輸入資料,並重覆類似流程數次之後,系統最後呈現該功能程式的輸出圖表結 果。本研究依照操作流程,將功能程式的輸入畫面切割成數份區塊,分析整理流程的 路徑特徵,加以編碼和分類後,繪製畫面流程特徵值與佈署圖,提出一套優質化的 GUI 畫面空間順序,讓使用者更有效率的操作使用此系統。事實上,此兩部分特徵化 結果的結合,可以作為次世代智慧型EDA 系統的技術開發參考,這也是先進晶圓廠IT 部門為符合多數工程師愈多的需求,必須改進現有的應用系統,以提升使用者效率, 增強全球競爭力。 關 |
英文摘要 | Abstract Two types of characterization work were studied based on a real engineering data analysis (EDA) application in a semiconductor fabrication. It was achieved first by the keywords extracted from those function names with a hierarchical structure in an EDA system. These keywords were then summarized into a function name characterization table. Engineers will benefit from such a table for the quick search of those EDA functions on demand to solve the low yield events. This paper focuses on the other characterization work about the flow structure of function operation among the graphical user interface screens of EDA functions. There exists a flow sequence when engineers operating the EDA system. Namely, EDA system will show up the correspondent output after an engineer inputs some data needed. Since the result is not good, engineers need input other data and check the output again. Such operation will repeat several times. This study begins with some main categories and their respective categories about the flow structure of EDA system are first determined. GUI screens of function are then divided into several blocks. Characterization codes of function flow structure are extracted into a deployment table. An optimal GUI screen is therefore explored to speed up the operational efficiency of EDA functions. Finally, the combination of two types of characterization work will strengthen the development of nextgeneration intelligent EDA system. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。