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題名 | 電子微探儀=Electron Probe Microanalyzer |
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作者姓名(中文) | 杜正恭; 王凱正; 蔡淑月; | 書刊名 | 科儀新知 |
卷期 | 30:6=170 2009.06[民98.06] |
頁次 | 頁69-76 |
分類號 | 336.2 |
關鍵詞 | 電子微探儀; 聚焦電子束; 電子顯微鏡; 波長散佈分析儀; EPMA; |
語文 | 中文(Chinese) |
中文摘要 | 電子微探儀係利用聚焦電子束進行微區分析之電子顯微鏡,其分析方式與一般常見的能量散佈光譜儀相似,但其運作原理則截然不同。電子微探儀是藉由分析特徵X光的波長以辨別元素,其具有較佳的峰值∕背景 (P/B) 比,故可進行較精確的定量分析,其準確度可達100 ppm。本文將先介紹電子微探儀的發展與原理,再說明其分析方式與應用。 |
英文摘要 | Electron probe microanalyzer (EPMA) is a scanning electron microscope which employs the focused electron beam to analyze the composition in a micro region. The analysis method of EPMA is similar th the commercial energy dispersive spectrometer (EDS). However, the operation principle is entirely different from EDS. The theory of EPMA is to analyze the wavelength of characteristic X-ray to evaluate the element concentration. The quantitative analysis can be carried out by EPMA due to the good P/B ratio of spectrum with the resolution better than 100 ppm. In this article, the development and theory of EPMA are revealed, and then the analysis methods and applications are also described. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。