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題 名 | 談12吋晶元機之諧波抑制對策=ImProvement of Harmonic Problems for a 12-in Crystal Puller |
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作 者 | 林昆平; 林明鋒; | 書刊名 | 台電工程月刊 |
卷 期 | 607 1999.03[民88.03] |
頁 次 | 頁28-35 |
分類號 | 448.3 |
關鍵詞 | 12吋晶元機; 靜磁器; 諧波電流失真; 綜合諧波; 電流失真; THD胓; 12-in crystal puller; Crystal magnet; Harmonic current distortion; D; Total harmonic current; Distortion; |
語 文 | 中文(Chinese) |
中文摘要 | 晶元機是半導體廠晶元生產的核心,很不幸這類機器卻是大容量的諧波負載,其 產生的諧波電流往往污染供電品質並造成廠內外的停電事故。本文由晶元機產生諧波特性談 起,進而以一國外12吋晶元廠跳電事故為例進行諧波分析與故障排除;文中亦將提出筆者獨 特的抑制諧波技術(1,2),相信對國內半導體廠的供電品質維護有所助益。 |
英文摘要 | The crystal puller, though an important machine in semiconductor factories, produces large amount of harmonic currents, sometimes resulting in severe power quality problems and even power failure. In this paper, the harmonic characteristics produced by the crystal puller were firstly discussed. Then, taken as an example, the harmonic problem caused by a 12-in semiconductor factory was analyzed. And finally, a novel approach for limiting harmonic and improving reactive power compensation with singletuned filters was presented. |
本系統中英文摘要資訊取自各篇刊載內容。