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題 名 | 紅外線MOS-微電阻量測技術與特性分析 |
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作 者 | 魏水根; | 書刊名 | 東南學報 |
卷 期 | 17 1994.12[民83.12] |
頁 次 | 頁59-86 |
分類號 | 448.57 |
關鍵詞 | 紅外線輻射計量學; 紅外線影像產生器; 微型輻射源陣列; V型槽微型加工法; 全晶片積體電路; 熱輻射器; Infrared radiometry; Infrared scene generator; Micro radiator array; V-grooved micromaching wafer scale integration; Heat emitter; |
語 文 | 中文(Chinese) |
中文摘要 | 本文在於量測一個利用普通IC製程所製造出來之MOS-微電阻陣列之特性,它可以 用來做微型紅外線熱源。這種具有MOS電路整合之微電阻陣列是做在常見之矽晶片上,每個 微電阻是懸浮在一空腔上與周遭有很好之熱隔離,並且每個微電阻皆可以由一精準之電流控 制,最高可以熱到發橘紅色光的1300K,由於它的低熱質量(Thermal mass)與空腔之高熱 絕熱效果,所以它可以工作在很高頻率,到每秒鐘350畫面,用來產生具有真實感之高速紅 外線影像。在本研究中,發展了幾種紅外線量測技術,同時亦配合電腦之演算做非線性插值 計算,其結果與量測步驟和紅外線計算之電腦程式經驗皆有助於專科之紅外線系統工程和偵 檢器技術之教學,同時文中亦討論到這種紅外線元作之新應用,例如:高速熱感應印字機頭 、自校式耳溫計。 |
英文摘要 | An Infrared scene emitter array (MOS-resistor technology)based on commercial available IC process was measured. The MOS-resistor array is fabricated on Sisuch that The resistors are thermally isolated from one another and from their surrounding. Each resistor is independently heated to and desired temperature up to 1300K by an accurately controlled pulsed current. Due to its low thermal mass and high thermal isolation, the MOS-resistor array can be operated up to 350 frames/sec allowing it to generate realistic fast-moving scenes. In this paper, several measurement techniques are developped cooperated with computer calculation for the infrared radiometry engineering. The results, mesurement procedure and computer programming for the infrared radiometry engineering will help the education in infrared system engineering and sensor technology in the college. New applications of this devices are also examined such as high speed thermal printer head and self calibrated ear thermometer. |
本系統中英文摘要資訊取自各篇刊載內容。