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題名 | Effect of DC Sputtering Power on Structure and Electrical Properties of Mo Thin Films=直流濺鍍功率對Mo薄膜成長優選方向之影響 |
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作者 | 許宏華; 楊鈞程; 梁仕昌; 蔡林昌; 蒲念文; | 書刊名 | 中正嶺學報 |
卷期 | 43:2(A) 2014.11[民103.11] |
頁次 | 頁61-68 |
分類號 | 472.16 |
關鍵詞 | Mo薄膜; 優選方向; 表面能; 應變能; Mo thin films; Preferred orientation; Surface energy; Strain energy; |
語文 | 英文(English) |