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題名 | 超快速常壓石墨烯微波製程開發之研究=Ultra-fast Graphene Synthesis via Microwave Process in Air |
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作者 | 顏文群; 陳雨澤; 闕郁倫; | 書刊名 | 真空科技 |
卷期 | 26:2 2013.06[民102.06] |
頁次 | 頁43-48 |
分類號 | 440.34 |
關鍵詞 | 石墨烯; 微波; 常壓; 高定向石墨; Graphene; Rapid microwave heating process; Ambient gas; Highly oriented graphite; |
語文 | 中文(Chinese) |
中文摘要 | 在本團隊開發的微波製程中,以碳化矽鑄錠為加熱基座,2.45 GHz多模微波(Multi-mode Microwave)為能量源,讓強偶極性的碳化矽與入射微波發生耦合吸收,並使分子轉動而產生熱能,形成一個高熱源。於此高熱源上放置事先以電子束沉積法依序鍍製鎳及無序碳(Amorphous Carbon)至二氧化矽/矽的基板上並通予微量的氮氣吹拂,在高熱的狀態下,碳原子擴散進入鎳膜中,於冷卻的階段析出於表面並形成石墨烯。由於碳化矽升溫速度快,因此整個製程包含升降溫僅需約3~5分鐘。由於此製程在常壓環境下完成,部分氧氣將與鎳及碳產生反應,鎳膜將經由氧氣的氧化與碳的還原作用達到平衡而維持部分金屬本質,保留適合石墨烯析出的晶格狀態。此外,於鎳膜與基板間也會有多層的高定向石墨(Highly Oriented Graphite)析出,且其與無序碳間的轉換率高達80%。由於此技術具備快速節能且能在常壓環境中製成,因此可望成為量產石墨烯的重要製程技術之一。 |
英文摘要 | A new method to synthesize graphene and highly oriented graphite via Ni-catalyzed solid phase segregation using amorphous carbon as a resource by the rapid microwave heating process (RMHP) in air was demonstrated. The corresponding carbon solubility in Ni is crucial issue to have the enough carbon sources to protect the Ni surface from the oxidation or to reduce the NiO during heating process and then have a platform to segregate the graphene on the surface in air. The thicker Ni catalyst layer will then have the better endurance for the surface deformation. The oriented graphite layers are thus grown and the converting rate from the source to graphite layer is ~80 %. The graphene layers will be later segregated on the reduced Ni surface during cooling process. The entire process is within 3-5 mins. The low power consumption and rapidity make this technique to be a promising method for different demands. |
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