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| 題 名 | 溶膠凝膠法製備添銻二氧化錫透明薄膜之特性研究=Characteristics of Sol-Gel Derived Sb-doped SnO₂ Transparent Films |
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| 作 者 | 鄭建星; 林永崧; | 書刊名 | 遠東學報 |
| 卷 期 | 28:2 2011.06[民100.06] |
| 頁 次 | 頁163-168 |
| 分類號 | 440.34 |
| 關鍵詞 | 二氧化錫; 透明導電膜; 溶膠凝膠; Tin oxide; Transparent conductive oxide; Sol-gel; |
| 語 文 | 中文(Chinese) |
| 中文摘要 | 添加銻的二氧化錫由於具穩定性與低價格,而成為透明導電膜相當具吸引力的替代材料。此外,與傳統的真空技術相比,溶膠凝膠法製作氧化物薄膜有其特殊之優點,首先是溶膠凝膠法的製程容易且價格便宜,同時其可低溫製造,且易於控制氧化物的化學劑量比。本研究探討退火溫度與退火氣氛(氮氣與氧氣)對二氧化錫薄膜添加不同銻莫爾比的材料特性影響。 |
| 英文摘要 | Tin oxide (SnO2) incorporated with antimony is considered as an attractive candidate for transparent conductive oxide (TCO), because it owns a high stability and low cost. In addition, compared with conventional vacuum-based techniques, solution process becomes prevailing for fabrication of oxide thin films because the process takes low cost, can be done at low temperature, and is relatively easy to control the stoichiometry. This study investigates the effects of annealing temperatures and atmospheres on the characteristics of solution-processed SnO2 with and without adding Sb. The correlation among annealing temperatures, atmospheres and characteristics of SnO2 with and without adding Sb is explored. |
本系統中英文摘要資訊取自各篇刊載內容。