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題 名 | 以溶膠-凝膠法成長鉭酸鋰薄膜之晶體結構及電特性之研究=Structural and Electrical Properties LiTaO₃ Thin Films Derived by a Diol-Based Sol-Gel Process |
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作 者 | 高銘政; | 書刊名 | 修平學報 |
卷 期 | 16 2008.03[民97.03] |
頁 次 | 頁55-62 |
分類號 | 448.552 |
關鍵詞 | 鉭酸鋰; 溶膠凝膠法; 薄膜; 介電常數; 焦電係數; LiTaO₃; Sol-gel; Thin film; Dielectric constant; Pyroelectric coefficient; |
語 文 | 中文(Chinese) |
中文摘要 | 本研究以diol-based 溶劑為基礎的溶膠 -凝膠法成功地成長鉭酸鋰( LiTaO3)薄膜於 Pt(111)/SiO2/Si(100) 基板上,藉由顯微結構分析、介電及焦電特性量測,探討鉭酸鋰薄膜之特性,研究發現薄膜在 700 oC溫度以上之燒結後呈現多方向性成長的多晶相 (polycrystalline)。電性量測方面,在量測溫度 610 oC以下相對介電常數 (εr )會隨溫度增加而上升,而在 610 oC以上則是呈現下降的趨勢,顯示在 610 oC時薄膜會發生相轉換,其介電損失(tanδ),在溫度範圍 30-770 oC時的值都低於 0.006,且在溫度 62℃時會有最大焦電係數(γ) 4.0×10-8 C/cm2.K發生。結果顯示,本研究所製作之鉭酸鋰薄膜非常適合紅外線感測器之應用。 |
英文摘要 | Lithium tantalite (LiTaO3) thin films have been successfully deposited on Pt(111)/SiO2/Si(100) substrates by means of sol-gel spin-coating technology. The XRD results show that the LiTaO3 thin films heated at temperature higher than 700℃ exhibit randomly oriented polycrystalline. The relative dielectric constant (εr) increases from 35 to 300 at temperature ranging from 30 to 610 oC, then decreases as the temperature higher than 610 oC. The dielectric loss factor (tanδ) is as low as 0.006 at temperature ranging from 30 to 770 oC. The sample shows a phase transition at 610oC and a maximum pyroelectric coefficient (γ) of 4.0×10-8 C/cm2.K at 62oC. The results reveal that a high pyroelectric coefficient of this LiTaO3 thin film can be utilized in its application to detectors. |
本系統中英文摘要資訊取自各篇刊載內容。