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題 名 | 矩陣式光柵點掃描法之研究=Study on Scanning Methods Using Dot-Matrix Gratings |
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作 者 | 王敬中; 鄭于瑞; 葉勝利; | 書刊名 | 龍華科技大學學報 |
卷 期 | 22 2007.03[民96.03] |
頁 次 | 頁27-38 |
分類號 | 471.3 |
關鍵詞 | 掃描; 繞射; 矩陣式光柵點; Scan; Diffraction; Dot-matrix gratings; |
語 文 | 中文(Chinese) |
中文摘要 | 一般之表面的量測技術可分為二維尺寸與三維輪廓的量測,其中以三維輪廓的量測較為複雜與困難。目前的量測方式主要是以雷射掃描、掃描式探針、顯微輪廓儀為主,其量測精度、掃描面積或掃描速度會有其一定限制。本研究則主要探討以數位式光柵法同時產生數條掃描線之掃描。利用矩陣式排列之光柵點之快速平移,可讓固定方向入射之雷射光繞射出單線或多線、直線或曲線式之繞射光點效果,甚至可顯示動畫效果。本文中先探討光學之干涉和繞射理論,再介紹如何利用兩點干涉儀加工出矩陣式排列之光柵點。對於需同時繞射出多個繞射光點之情況,本文中也詳細介紹其光柵點之交織編碼方式。最後多個實驗將被用來驗證本繞射式掃描法之可行性。 |
英文摘要 | The techniques to measure surface features can be divided into measuring two-dimensional (2-D) outlines and measuring three-dimensional (3-D) profiles. The techniques to measure 3-D profiles are more complex than those to measure 2-D outlines, and the former include laser scanners, scanning probes, and microscopic profilemeters. But some of the above-mentioned techniques are not very precise, some of them are slow and some of them are performed for small scanning sizes only. This study will focus on the techniques to create multiple scanning lines simultaneously by using digital gratings. These techniques need dot-matrix gratings. Dot-matrix gratings can diffract an incident laser beam into several diffracted spots and the spots position can be changed very fast by moving the dot-matrix gratings. The position changes of diffracted spots can show scanning effects of single of single or multiple lines, straight lines or curve lines, and dynamic images. In this paper, some interference and diffraction theories are analyzed first. Then the methods to create dot-matrix gratings with a two-beam writer are introduced. This paper also detailedly introduces the grating-dot encoding methods to simultaneously diffract into several diffracted spots with a laser. Finally, many experiments will be used to verify the practicability of the proposed diffractive scanning methods. |
本系統中英文摘要資訊取自各篇刊載內容。