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題名 | 應用微波電漿進行不銹鋼表面氮化之研究=A Study of Application of the Microwave Plasma for Nitriding Stainless Steel Surface |
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作者姓名(中文) | 曾文利; 劉沖明; 宋大崙; | 書刊名 | 龍華科技大學學報 |
卷期 | 22 2007.03[民96.03] |
頁次 | 頁21-26 |
分類號 | 440.365 |
關鍵詞 | 微波電漿; 不銹鋼; 氮化; Microwave plasma; Stainless steel; Nitriding; |
語文 | 中文(Chinese) |
中文摘要 | 本研究以微波電漿(2.45GHz)進行AISI-303不銹鋼表面氮化,處理溫度為450℃,腔體壓力為4 Torr。探討處理時間對於氮化效果之影響。經氮化處理後之試片做微硬度分析,並以X光繞射儀(XRD)分析氮化層結構、電子顯微鏡(SEM)觀察氮化層厚度以及能量發散光譜儀(EDS)觀察氮原子分布情形。實驗結果顯示電漿功率700W處理時間80分鐘時,其硬度可達到1242Hv,約為原始試片的7倍,而氮化層厚度約可達到6μm。 |
英文摘要 | This paper presents the surface characters and mechanical properties of AISI-303 stainless steel surface by microwave plasma nitriding at 450°C and 4 Torr. The surface morphology is studied by scanning electron microscope (SEM). The crystallographic structure of the treated sample is assessed by X-ray diffraction (TF-XRD). In order to verify the mechanical property, the microhardness analyses is conducted to measured the microhardness. The experimental results show that the microhardness is significantly increased after nitriding. The value of the nitride layer is 1242Hv and the thickness of nitride layer reaches to 6μm under the 700W plasma power and 80 min processes time. |
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