頁籤選單縮合
題名 | 超快雷射應用於聲波元件之研究=An Investigation on Acoustic Device Using Ultrafast Laser |
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作者姓名(中文) | 李大青; 林文仁; 胡榮章; | 書刊名 | 新新科技年刊 |
卷期 | 3 2007.01[民96.01] |
頁次 | 頁224-233 |
分類號 | 448.533 |
關鍵詞 | 超快雷射; 皮秒超音波; 聲波元件; Ultrafast laser; Picosecond ultrasonics; Acoustic device; |
語文 | 中文(Chinese) |
中文摘要 | 超快雷射具有超短脈衝特性,照射在金屬表面時將產生脈衝寬度為皮秒級的超音波,利用此極高空間解析的超音波可量測奈米薄膜的聲學特性,而高頻聲波元件其薄膜的厚度便僅達數百奈米,因此皮秒超音波極適合量測組成高頻聲波元件薄膜的聲學特性。本文中已量測氧化鋅、鉬、鎳、鎢、二氧化矽等奈米薄膜,並且也以超音波輔助監控雙層布拉格反射器的厚度。 |
英文摘要 | Owing to the ultra-short-pulse property, the ultrafast laser can generate picosecond ultrasonic waves through the incidence on the surface of metal. Using the high spatial resolution ultrasonics, the acoustic phenomena of nano-film can be measured, and we can investigate on the acoustic device operating at high frequency through the picosecond ultrasonics. In this study, ZnO, Mo, Ni, W, and SiO₂ have been analyzed, meanwhile, the thicknesses of double-layers of Bragg reflector also be monitored accessorily by ultrasonics. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。