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題 名 | 無線通訊之關鍵零組件--表面聲波元件=The Key Components for Wireless Communication--Surface Acoustic Wave Devices |
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作 者 | 楊證富; | 書刊名 | 筧橋學報 |
卷 期 | 7 2000.09[民89.09] |
頁 次 | 頁1-17 |
分類號 | 448.551 |
關鍵詞 | 表面聲波元件; 對指狀換能器; 濾波器; 共振器; Surface acoustic wave devices; Interdigital transducers; Filter; Resonator; |
語 文 | 中文(Chinese) |
中文摘要 | 表面聲波(SAW)元件今的通訊系統及信號處理上已備受矚目。一般表面聲波元件都是使用反應性射頻磁控濺鍍法在壓電基板上(氧化鋁、鈮酸鋰等)鍍上非壓電性薄膜,另一種是於非壓電機板上鍍上壓電薄膜(氮化鋁薄膜),然後再製作對指狀換能器電極而成,如此便可測試表面聲波元件之特性。在此也介紹於壓電基板上(氧化鋁、鈮酸鋰等)鍍上壓電薄膜(氮化鋁薄膜)之雙壓膧層結構。表面聲波元件現今廣泛被使用在濾波器、共振器、延遲線、振盪器或是表面聲波感測或感光元件,未來個人行動系統表面聲波元件更是一個不可或缺之零組件。 |
英文摘要 | The surface acoustic wave (SAW) devices play an important role in today's communication system and signal processing. On a high quality substrate (AI2O3 or LiNbO3), the reactive RF magnetron sputtering is used to deposit a highly c-axis oriented AIN film, which has the smooth surfaces, good adhesion, and strong piezoelectricity. This is double-layered-piezoelectric structure. The interdigital transducers (IDTs) are fabricated on the film as an electrode, then the surface acoustic properties of the deposited AIN film can be estimated. The surface acoustic wave devices can be used in IF or RF filter、resonator、delay line、oscillator or surface acoustic wave or photo sensors. SAW devices would be the important components in protable communication system. |
本系統中英文摘要資訊取自各篇刊載內容。