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題名 | AFM, EDS and XRD Microstructural Characterizations of Pd-Ag/PSS Membranes=以AFM, EDS及XRD分析Pd-Ag/PSS膜微結構特性 |
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作者 | 林文雄; 張新福; | 書刊名 | Journal of the Chinese Institute of Chemical Engineers |
卷期 | 37:3 民95.05 |
頁次 | 頁239-247 |
分類號 | 472.16 |
關鍵詞 | 合金膜; 析鍍; 鍛燒; Sequential electroless plating; Pd-Ag/PSS membrane; Scanning electron microscopy; Energy dispersive spectroscopic analysis; Atomic force microscopy; |
語文 | 英文(English) |
中文摘要 | 本研究以連續無電鍍製程,在孔洞不鏽鋼底材析鍍緻密、無孔洞鈀膜及鈀銀合金膜,以掃瞄式電子顯微鏡(SEM)、能量分散光譜(EDS)、原子力顯微鏡(AFM)及艾克斯繞射光譜(XRD)探究膜之特性。由AFM圖譜得知:無電鍍製程中,析鍍速率較慢,則具有較小析鍍層粗糙度;由EDS圖譜了解:藉由遲續無電鍍鈀及銀之析鍍程序,製備鈀銀合金膜鍍層,其表層及底材孔洞內之組成是一致的;由XRD圖譜顯示:鈀及銀之特性波峰可藉由鍛燒程序,成為單一特性波峰,並藉由波峰位置及平均晶格距離之關係,得知合金膜之組成。 |
英文摘要 | In the present investigation, dense, defect free palladium and palladium-silver alloy membranes were prepared on porous stainless steel by means of the sequential electroless plating technique. Full characteriztoins of the Pd-Ag/PSS membranes were performed using scanning electron microscopy (SEM), energy dispersive spectroscopic analysis (EDS), atomic force microscopy (AFM), and an X-ray diffractometer (XRD). AFM images showed that in the electroless plating process, lower skin layer rouoghness and a lower deposition rate were related. Although deposition was conducted through a sequential process, the surfaces on or inside the substrate showed homogenous deposition, as determined through EDS analysis. XRD reflection peaks indicated that the palladium and silver together formed a homogeneous alloy after annealing. The relationship between the average lattice spacing and peak positions and be used to estimate the membrance composition. |
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