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題名 | Quantum Well Infrared Photodetector with V-Groove Structure for Normally Incident Light Coupling=量子井紅外線偵測器中用以耦合垂直入射光的V型谷結構的設計與製作 |
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作者姓名(中文) | 黃建奇; 管傑雄; | 書刊名 | 國立臺灣大學工程學刊 |
卷期 | 79 2000.06[民89.06] |
頁次 | 頁61-67 |
分類號 | 471.3 |
關鍵詞 | 量子井; 紅外線光偵測器; V型谷結構; Quantum well; Infrared photodetector; V-groove structure; |
語文 | 英文(English) |
中文摘要 | 由於電子躍遷的選擇律之限制,量子井紅外線光偵測器無法吸收垂 直量子井層入射的光線。然而,運用非等向性化學蝕刻在量子井偵測器上製 作V型谷結構,可以耦合垂直入射之光線。本文利用幾何光學來估計具V型 谷結構之量子井偵測器耦合垂直入射光的效率;並提出一套製作程序,用來 製作具V型谷結構之量子井偵測器。由光電流響應的量測顯示,V型谷結構 耦合垂直入射光的能力可大致等效於45�a 斜面角TM模式的入射。 |
英文摘要 | Due to the selection rule of the electron transition, quantum well infrared photodetectors (QWIPs) can't absorb incident light perpendicular to the quantum well layers. However, a V-groove structure can be fabricated on the QWIP by using anisotropic etching to couple the normally incident light. In this paper, the efficiency for the QWIPs with V-groove structure to couple the normally incident light is estimated by applying the ray optics. A feasible processing procedure for fabricating the V-groove structure is proposed. The responsivity measurement shows that the V-groove structure can couple the normal incident light with the same efficiency as the TM mode light incident into the 45�a edge facet of the photodetector. |
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