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題名 | Properties of Native Oxide Films Grown by Liquid Phase Chemical-Enhanced Oxidation on (NH[feb2])[feaf]S戓-Treated GaAs Surface=以硫化銨處理後之砷化鎵表面以液態化學輔助氧化法成長之本質氧化層之特性 |
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作者姓名(中文) | 周德威; 廖坤厚; 戴學斌; | 書刊名 | 航空技術學校學報 |
卷期 | 2:1 2000.08[民89.08] |
頁次 | 頁49-56 |
分類號 | 346.63 |
關鍵詞 | 氧化層; 硫鈍化; 活化能; 氧化反應; Oxide film; Sulfur passivation; Oxidation reaction; Activation energy; |
語文 | 英文(English) |