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題名 | Study of Photon Stimulated Desorption on Aluminum Alloy with Synchrotron Light=以同步輻射光研究鋁合金表面上之光子激發釋氣 |
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作者 | 許瑤真; 張世汯; 熊高鈺; 翁宗賢; 許憲能; 熊國添; 陳俊榮; Hsu, Yao-jane; Chang, Shi-horng; Hsiung, Gao-yu; Ueng, Tzong-shyan; Hsu, Shen-nung; Yong, Kok-thiam; Chen, June-rong; |
期刊 | 真空科技 |
出版日期 | 19991200 |
卷期 | 12:4 1999.12[民88.12] |
頁次 | 頁4-10 |
分類號 | 339.2 |
語文 | eng |
關鍵詞 | 12-150 eV; PSD; PES; SIMS; Synchrotron light; 同步輻射光; 鋁合金; 光子激發釋氣; |
中文摘要 | 本文主要是利用同步輻射光(12-150 eV)研究鋁合金表面上之光子激發釋氣。分析 工具包括光電子能譜和二次離子質譜來分析表面上組成之變化,光子激發釋氣能譜和試片電 流能譜則用來了解鋁合金表面上之釋氣行為與光子能量之關係。佐以氬離子濺射試片的深度 分析來了解鋁合金氧化層對光子激發釋氣的影響。 |
英文摘要 | Photon stimulated desorption (PSD) from the aluminum surface was investigated by synchrotron light at 12-150 eV. The photoelectron spectroscopy (PES) and the secondary ion mass spectroscopy (SIMS) were used to analyze the variation of surface compositions. Target currents of the aluminum alloy irradiated by synchrotron light were measured to interpret the mechanism of ion desorption. The depth profile analysis with ion beam sputtering was used for comprehensive understandings of the correlations between desorption behaviors and surface oxide layers. |
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