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頁籤選單縮合
題名 | Applied Combined Piezo-VCM Actuator to Precision Positioning Device with Frictional Constraint=運用壓電元件與音圈馬達驅動具摩擦力調節之精密定位裝置 |
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作者 | 王俊超; 劉永田; Wang, C. C.; Liu, Y. T.; |
期刊 | 高苑學報 |
出版日期 | 20070700 |
卷期 | 13 2007.07[民96.07] |
頁次 | 頁91-116 |
分類號 | 446.8401 |
語文 | eng |
關鍵詞 | 壓電元件; 音圈馬達; 精密定位; Voice coil motor; VCM; Piezoelectric; PZT; Impulsive force; One-degree-of-freedom; 1-DOF; Precision positioning; |
英文摘要 | This paper focus on the study of steady characteristic of a voice coil motor (VCM) actuating device using the piezoelectric (PZT) impulsive force. In this paper, an one-degree-of-freedom (1-DOF) experimental setup was configured to examine the actuating positioning performance and the parametric identification for the VCM was performed based on the recursive-least-square (RLS) method. This positioning device featuring micro and nano-order actuating ability is obtained by the PZT impulsive force caused by the amplitude of applied voltage and the controlled differential force formed with the coil port of the VCM. The experimental results shown that the positioning table having mass 881 g was successfully positioned within the positioning accuracy of 10 nm by both the forward and backward positioning processes. With long-stroke and high precision positioning abilities, it is expected that the combined piezo-VCM actuator coupled with an effective control strategy can be widely applied to the precision industry, such as the applications in manufacturing, assembling, examining, or aligning works for the miniaturized components. |
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