查詢結果分析
相關文獻
- Application of Piezo-VCM Actuator to Precision Position Control of High-Precision Positioning Table
- Applied Combined Piezo-VCM Actuator to Precision Positioning Device with Frictional Constraint
- 運用田口法探討結合壓電與音圈馬達之驅動器驅動精密定位平臺的參數最佳分析
- 彈性體支撐之壓電元件在光纖自動對準裝置上之應用研究
- 以Mixed Gain Scheduling/MRAC控制器應用於超精密定位系統之研究
- 使用空氣滑件的精密定位裝置
- An Investigation of Adaptive Control Strategies for Ultra-Precision Positioning Servo Systems
- Combination of TTDD and PDF Control for Backlashless Operation
- 人工雨滴衝擊力量測系統之研究
- 銲線機精密定位模組設計技術
頁籤選單縮合
題 名 | Application of Piezo-VCM Actuator to Precision Position Control of High-Precision Positioning Table=應用壓電元件與音圈馬達致動器對高精度滑動平臺之精密定位 |
---|---|
作 者 | 王俊超; 劉永田; 馮榮豐; | 書刊名 | 高苑學報 |
卷 期 | 11 民94.07 |
頁 次 | 頁61-66 |
分類號 | 446.8401 |
關鍵詞 | 音圈馬達; 壓電元件; 積分形可變結構控制器; 衝擊力; 精密定位; Voice coil motor; Piezoelectric element; Integral variable; Stucture controller; Impact force; Precision positioning; |
語 文 | 英文(English) |
中文摘要 | 本文章提供一個新式的高精度定位驅動器,此驅動器由壓電元件與音圈馬達所組成。此新式驅動器可以應用在製造業、組裝業、偵測檢查與微組裝線上精密產業應用上。本驅動器具有長行程定位平台,可由積分形可變結構控制方式對音圈馬達做粗定位控制,而微奈米級的精密定位控制由壓電元件藉由衝擊力驅動方式來做控制,因此本驅動器具有長行程與微奈米級精密定位的能力,是非常適合於高精密定位工業的應用。 |
英文摘要 | This paper reports about a novel high-precision positioning actuator composed of a piezoelectric element (PE) and a voice coil motor (VCM). The novel actuator is applicable to the fields of manufacturing, assembling, examining, and aligning works for the miniaturized components of high-tech industry. It shows that the long-range positioning table could be actuated continuously by the integral variable structure controller for the VCM, and nanometer positioning capability by the impact force controller for the piezoelectric element. Hence, it could behave as a high-precision actuator with the long-range and nanometer positioning capability. It will be widely applied to the precision industry. |
本系統中英文摘要資訊取自各篇刊載內容。