頁籤選單縮合
題 名 | 奈米級摩擦式驅動精密定位機構=A Friction Drive Micropositioning Mechanism with Nanometer Resolution |
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作 者 | 張所鋐; 李昇憲; | 書刊名 | 國立臺灣大學工程學刊 |
卷 期 | 76 1999.06[民88.06] |
頁 次 | 頁51-65 |
分類號 | 446.8401 |
關鍵詞 | 摩擦驅動; 奈米級解析度; 壓電致動器; Friction drive; Nanometer resolution; Piezo-actuator; |
語 文 | 中文(Chinese) |
中文摘要 | 本文報告一種利用摩擦滯滑現象,及積層式壓電致動器所推動之長距 離精細位移,設計成之精密定位機構,並建立運動之數學模式,分別以傳統摩擦 模型,Karnopp摩擦模型及重置積分模型,模擬定位機構之動態行為,數值計算 顯示Karnopp模型最適合本定位機構之實況;又經實驗量測,確認7.5奈米之位 移解析度,適合高精度定位儀器之應用。 |
英文摘要 | This paper reports the design and performance of a multi-layer piezodriven friction drive micropositioning mechanism capable of long distance travel. The design is accompanied with parametric analysis using a mathematical model that includes the traditional friction, Karnopp friction and reset integrator models. Numerical results illustrate the Karnopp model fits the physical reality in this study. Experimental measurements show a 7.5 nanometer resolution of the proposed micropositioner. It's applicable for high precision instruments. |
本系統中英文摘要資訊取自各篇刊載內容。