頁籤選單縮合
題 名 | 掃瞄式電子顯微鏡的原理與應用=The Functions and Applications of Scanning Electron Microscope |
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作 者 | 張瑞東; | 書刊名 | 技術與訓練 |
卷 期 | 23:1=188 1998.02[民87.02] |
頁 次 | 頁1-12 |
專 輯 | 材料分析儀器專集 |
分類號 | 471.713 |
關鍵詞 | 掃瞄式電子顯微鏡; Scanning electron microscope; SEM; |
語 文 | 中文(Chinese) |
中文摘要 | 掃瞄式電子顯微鏡( SEM )是一種用途廣泛,功能極強的儀器,主要的功能是用 來觀察材料的微觀組織,分析材料的微區化學成分。本文以淺顯而易於了解的方式介紹 SEM 的原理及構造,內容包括:(1)SEM 的演進及特性。(2)SEM 的構造如電磁透鏡及各種偵測器 。(3)SEM 電子束和試片的交互作用。 (4) 中鋼的 SEM 其功能及應用實例。(5)SEM 其他的 應用功能及最新發展趨勢。希望方便於廠內同仁應用 SEM 於自己的研究工作上。 |
英文摘要 | The scanning electron microscope (SEM) is one of the most versatile instruments available for the examination and analysis of the microstructural features of solid objects. This report gives a general introduction of the basic knowledge of SEM including (1) the evolution and the advantage of SEM, (2) the electron optical system and detectors, (3) the characteristics of interactions between electron-beam and sample, (4) the functions and applications of SEM in CSC, and (5) other applications and newly devolped SEM. Throughout this report, it was attemped to describe the theorey and the sturcture of SEM clearly and intelligibly. Therefore, the readers can use SEM more effectively in their work. |
本系統中英文摘要資訊取自各篇刊載內容。