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題名 | Homo-Multilayer ITO Films on PET Substrates Using Continuous Roll-to-Roll Sputtering Processing=同型多層ITO薄膜在PET基材上採用連續捲軸濺射式製程技術 |
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作者姓名(中文) | 曾志隆; 林雅雯; 江柏叡; 周肇基; | 書刊名 | 中正嶺學報 |
卷期 | 45:2(A) 2016.11[民105.11] |
頁次 | 頁23-27 |
分類號 | 440.34 |
關鍵詞 | 同型多層; 捲軸濺射; ITO薄膜; PET基材; ITO films; Homo-multilayer; PET substrates; Roll-to-roll sputtering; |
語文 | 英文(English) |
中文摘要 | 我們用連續捲軸室溫濺射式製程技術實現同型多層 ITO 薄膜沉積在PET 基材上。當堆放 至homo-5-layer ITO 薄膜,我們可以得到最好的可見光90.12%透光率;堆放至homo-10-layer ITO 薄膜,可以得到最低的68Ω/□薄層電阻。我們從TEM 研究ITO 薄膜的TEM 衍射圖像, 可看出最優的5 層結構晶體和奈米級顆粒結晶(~50 奈米)均勻地分佈在整個表面,我們亦從 AFM 可以得到5 層ITO 薄膜平均粗糙度為1.551 奈米。 |
英文摘要 | The homo-multilayer indium tin oxide (ITO) films have been deposited onto polyethylene terephthalate (PET) substrates by continuous roll-to-roll sputtering at room temperature. While piling up to homo-5-layer ITO film, the best transmittance of 90.12% in visible wavelength and piling up to homo-10-layer ITO film, the sheet resistance of 68Ω/□ are obtained. The TEM diffraction images of ITO films show crystalline at the optimal 5-layer structure, and the nano-sized grains (~50 nm) distributed uniformly all over the surface from TEM investigation. The 5-layer ITO film average roughness is 1.551 nm from AFM investigation. |
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