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題名 | 利用斜向沉積技術製鍍多樣性金屬奈米陣列=Using Glancing Angle Deposition to Fabricate Various Metal Nano-Structured Arrays |
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作者姓名(中文) | 任貽均; 鄭祺耀; 江建穎; | 書刊名 | 真空科技 |
卷期 | 28:1 2015.03[民104.03] |
頁次 | 頁41-45 |
分類號 | 440.3 |
關鍵詞 | 斜向沉積; 奈米柱陣列; 薄膜; 超穎材料; Glancing angle deposition; Nanorod array; Thin film; Metamaterial; |
語文 | 中文(Chinese) |
中文摘要 | 本文運用物理氣相沉積法(Physical Vapor Deposition, PVD)搭配斜向沉積技術(Glancing Angle Deposition, GLAD)[1],實現出多樣性的奈米柱陣列薄膜結構,例如Nanorod、Zigzag與Helical,這些結構存在著某些自然界物質或晶體所不常見或甚至是沒有的光學特性,因此必須使用專門的干涉量測架構以及參數計算來表示與分析其奈米結構的光學參數。我們實做出具有負折射率的銀奈米斜柱陣列、有相位延遲的光學特性的鋸齒狀結構薄膜以及具有反磁共振現象的銀-二氧化矽-銀奈米三明治結構陣列 |
英文摘要 | In this article we use glancing angle deposition (GLAD) to fabricate various nano-structures such as slanted nanorod array, chevronic nanostructured films and helical nanostructured films. Those artificial nano-structures own special optical properties that do not exist in nature. The optical parameters of those deposited metamaterial films are analyzed and measured. The reversal magnetic dipole moment corresponding to the negative permeability is theoretically demonstrated for those nanostructured films by applying near field simulation. The sandwiched silver-SiO2-silver with negative index is developed to improve the loss problem of metamaterial. |
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