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題 名 | 光電化學氧化披護陣列式氧化鋅奈米柱紫外光檢測器=Photoelectrochemical Oxidation Passivated ZnO-based Nanorod Array Ultraviolet Photodetectors |
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作 者 | 林子舜; 李欣縈; 李清庭; | 書刊名 | 真空科技 |
卷 期 | 27:1 2014.03[民103.03] |
頁 次 | 頁33-37 |
專 輯 | TVS-2013年會得獎論文 |
分類號 | 448.59 |
關鍵詞 | 光電化學氧化法; 紫外光檢測器; 氧化鋅奈米柱陣列; 低溫氣相冷凝系統; Photoelectrochemical oxidation method; Ultraviolet photodetectors; Vapor cooling condensation system; ZnO-based nanorod array; |
語 文 | 中文(Chinese) |
中文摘要 | 藉由新穎之低溫氣相冷凝系統,成長高品質低缺陷之p型、本質以及n型氧化鋅奈米柱於藍寶石基板,並成功製作陣列式氧化鋅奈米柱紫外光檢測器,與其它形式的光檢測器相比,此陣列式奈米柱光檢測器具有高效率增益的優點,但由於奈米柱結構的表面缺陷會降低元件特性,本元件利用光電化學氧化法進行氧化鋅奈米柱表面披覆,並進行比較不同處理時間之元件特性。由實驗結果顯示,在處理時間為90秒時,其元件具有最佳的特性,在波長為360 nm以及偏壓為-1 V時,無表面披覆處理與有表面披覆處理之陣列式光檢測器檢測度分別為4.43×10^(13) cmHz^(1/2)/W以及3.51×10^(15) cmHz^(1/2)/W,光電化學氧化法為有效修補奈米柱表面缺陷的技術,提升其元件特性,本研究結合低溫氣相冷凝系統與光電化學氧化法,成功製作高性能陣列式氧化鋅奈米柱紫外光檢測器。 |
英文摘要 | The novel vapor cooling condensation system was used to grow high quality and low defect p-type, intrinsic, and n-type ZnO thin films on sapphire substrates. Then, the ZnO-based nanorod array ultraviolet photodetectors were successfully fabricated. Compared to the other types of photodetectors, nanorod array photodetectors exhibited the important advantage of high efficiency-gain product. The performances of the photodetectors would be degraded nanorod by the surface states and the native defects resided on the sidewall surface of the ZnO nanorods. The photoelectrochemical oxidation method was used to passivate the surface states of the ZnO nanorods. Comparing the devices characteristics of various treatment times of the photoelectrochemical oxidation. The experimental results showed the photodetectors with photoelectrochemical oxidation treatment of 90 second had better performances. The detectivity of the unpassivated and the passivated ZnO-based nanorod array photodetectors at a light wavelength of 360 nm and operating at a reverse bias voltage of -1 V was 4.43×10^(13) cmHz^(1/2)W^(-1) and 3.51×10^(15) cmHz^(1/2)W-^(1), respectively. The photoelectrochemical oxidation method is a promising technique for passivating the surface states and effectively improving the performances of the ZnO nanorod photodetectors. The high performance ZnO-based nanorod array ultraviolet photodetectors were fabricated by combine the vapor cooling condensation system and the photoelectrochemical treatment method. |
本系統中英文摘要資訊取自各篇刊載內容。