頁籤選單縮合
題 名 | 皮米級雙頻雷射干涉儀=Pico-meter Heterodyne Laser Interferometer |
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作 者 | 吳見明; | 書刊名 | 光學工程 |
卷 期 | 120 2012.12[民101.12] |
頁 次 | 頁59-63 |
分類號 | 448.552 |
關鍵詞 | 干涉術; 干涉儀; 雙頻干涉儀; 奈米量測; 非線性誤差; Interferometry; Interferometer; Heterodyne interferometer; Nanometrology; Nonlinearity; |
語 文 | 中文(Chinese) |
中文摘要 | 本文描述研發新的雷射干涉系統,其根據三項設計準則:一、雙頻準則,二、避頻率混頻及偏振態交連準則,三、完美對稱準則。這樣的設計,可提升系統的雜訊免疫能力及系統的穩定度,並可消除週期性非線性誤差。整體系統是使用一單頻之穩頻氦氖雷射為光源,經由一移頻裝置將單頻光源分成一對帶有不同頻率,但其他特性完全相同之不重疊光源。此對空間不重疊光源並經由單模極化保持光纖引至干涉單元,而干涉單元是採用完全對稱準則。如此之系統符合前述之三項準則,並可作為量測線性位移、俯、仰、偏、擺及直線度之平臺。本雷射干涉系統完成後得到如下之成果: 1)週期性非線性誤差低於30皮米(pm),2)位移雜訊可低於2 pm/ÖHz。此系統是奈米量測之基礎平臺。 |
英文摘要 | This paper presents the development of a laser interferometric system based on three design principles, the heterodyne frequency, the avoiding mixing, and the perfect symmetry. These design principles give rise to the interferometer a highly stable system with, in principle, no periodic nonlinearity. The arrangement of the interferometer employs a single frequency stabilized He-Ne laser as the light source, a frequency-shifted means for converting the single laser beam into a pair of spatial-separated beams having the same optical properties but different optical frequencies, a pair of single polarization maintained fibers for delivering the heterodyne beams to the site for getting interference. The interferometric units are designed symmetrically. In addition to the spatial-separated beams with different frequencies, the system is compliant with the three design principles and may be developed as a plate-form to perform the measurements of displacement, pitch, yaw, and straightness of a rigid body. The developed interferometric system has the following specialties: 1) less than 30 pm in periodic nonlinearity, 2) displacement noise level as low as 2 pm/√Hz. It is the plate-form of interferometric systems for nanometrology. |
本系統中英文摘要資訊取自各篇刊載內容。