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題名 | 四軸旋轉掃描非球面干涉儀=4-Axes Rotational Scanning Asphere Interferometer |
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作者姓名(中文) | 張鴻聖; 林柏至; 陳彥安; 梁肇文; | 書刊名 | 光學工程 |
卷期 | 120 2012.12[民101.12] |
頁次 | 頁52-58 |
分類號 | 448.533 |
關鍵詞 | 旋轉掃描干涉儀; 子孔徑拼接干涉術; 隨機相位移演算法; Rotational scanning interferometer; Sub-aperture stitching interferometry; Random phase shifting algorithm; |
語文 | 中文(Chinese) |
中文摘要 | 子孔徑拼接式干涉術常被用來量測許多大口徑,高NA或是非球面鏡片的表面平整度。利用大部分的光學元件都具有的軸對稱之特性,本篇論文提出一個四軸的位移平臺機構,以旋轉的方式對待測鏡片進行掃描量測,擷取干涉條紋。並且開發出隨機相位移之相位還原演算法,利用旋轉時平臺所產生的震動造成隨機的相位移,增加系統對機械震動的容忍度,以達到抗震動的效果。 |
英文摘要 | A sub-aperture stitching interferometry method is developed to test the surface deformation of the high NA, large diameter or aspherical lens. The principle of the optical testing method is based on the 4 axes geometrical null utilizing the axial symmetry property of the test lens. The measurement throughput is significantly increased by adapting the rotational scanning mechanism. By adapting the vibration insensitive phase shifting algorithm, we are able to extract the phase of the interferogram reflected from an asphere during the rotational scanning motion in the presence of mechanical vibration from the moving stages. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。