頁籤選單縮合
題名 | 皮秒超音波技術應用於鑲嵌式薄膜諧振器元件設計及改良=Application of Picosecond Ultrasonics to the Design and Improvement of Solidly Mounted Resonators |
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作者 | 李大青; 蒲念文; 羅本喆; 高進興; 李鍾嵐; | 書刊名 | 中正嶺學報 |
卷期 | 41:1(A) 2012.05[民101.05] |
頁次 | 頁105-118 |
分類號 | 448.5 |
關鍵詞 | 布拉格反射器; 皮秒超音波; 鑲嵌式諧振器; Bragg reflector; Picosecond ultrasonics; Solidly mounted resonator; SMR; |
語文 | 中文(Chinese) |
中文摘要 | 本研究使用具有高空間解析度的皮秒超音波技術,應用在鑲嵌式諧振器各層薄膜之聲學特性分析及聲速量測。其次,針對降低布拉格反射器寄生電容問題,本文研製出具有高電阻率且高聲阻抗之氮化鉭(TaNx)薄膜,相較於金屬薄膜可降低電容值一半以上。最後,本研究以氮化鉭作為高聲阻抗層,二氧化矽作為低聲阻抗層,氧化鋅為壓電層,金為上下電極層,製作低寄生電容鑲嵌式薄膜諧振器。經量測操作頻率為11.8 GHz,諧振器之並聯諧振Q值為6.9。 |
英文摘要 | In this study, picosecond ultrasonics with high spatial resolution was employed to analyze the acoustic properties of constituent nanofilms in the solidly mounted resonators (SMRs). In addition, a new TaNx film with large acoustic impedance and extremely high resistance, which leaded to low-capacitance Bragg Reflectors, was fabricated. A low-parasitic-capacitance SMR was finally constructed with TaNx as the high acoustic impedance material, SiO2 as the low acoustic impedance material, ZnO as the piezoelectric layer, and Au as the top and bottom electrodes, respectively. The parallel Q factor and the central frequency of the SMR were, respectively, 6.9 and 11.8 GHz. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。