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題名 | 反應性共濺鍍鈦鎢複合氧化物薄膜之相變化與光致親水行為=Phase Transition and Photo-induced Hydrophilic Behaviors of Ti-W Composite Oxides Thin Films Deposited by Reactive Co-sputtering |
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作者 | 姚協廷; 蔡依敏; 王耀德; 廖錦璋; 陳錦山; Yao, X. T.; Tsai, Y. M.; Wang, Y. T.; Liao, G. C.; Chen, G. S.; |
期刊 | 真空科技 |
出版日期 | 20110300 |
卷期 | 24:1 2011.03[民100.03] |
頁次 | 頁44-50 |
分類號 | 448.552 |
語文 | chi |
關鍵詞 | 反應性濺鍍; 鈦鎢複合氧化物; 薄膜; 超親水; Reactive sputtering; WO₃; TiO₂; Ti-W composite oxide; Ti-W-O; Thin film; Super-hydrophilicity; |
中文摘要 | 本研究利用反應性中毒模式濺鍍鈦靶與鎢靶,在固定的 O2/Ar 分壓比率下,於未施加外電熱源的無鹼康寧玻璃基板上沉積 WO3、TiO2 薄膜,並藉由調控濺鍍功率以獲得不同組成之鈦鎢複合氧化物 (Ti-W-O) 薄膜。拉賽福背向散射術 (RBS)、X 光繞射術 (XRD)、掃瞄式電子顯微術 (SEM) 及接觸角量測儀,被用來探討大氣高溫處理對這些整體組成差異極大 ( 由WO3、Ti-W-O 系列至 TiO2) 之薄膜的化學組成、表面形態結構、相變化與親水特性所造成的影響。鈦的摻雜會改變 WO3 基地的相。而視鎢的摻雜濃度而定,TiO2 基地會呈現銳鈦礦相(A-TiO2)、金紅石相 (R-TiO2) 或 A-TiO2/R-TiO2 雙相共存。適當組成比例之 Ti-W-O 薄膜再經適溫熱處理及照光後,能有水接觸角僅為 3° 的超親水特性。 |
英文摘要 | In this study, reactive sputtering of Ti and W targets at poisoned modes and a fixed O2/Ar partial-pressure ratio is employed to deposit WO3 and TiO2, as well as a series of co-sputtered Ti-W composite oxide (Ti-W-O) thin fi lms under various power ratios onto alkaline-free glass substrates.Rutherford backscattering spectroscopy, X-ray diffractometry, scanning electron microscopy,and contact-angle measurement facility are used to analyze the impact of air-annealing on the composition, surface morphology, phase transition, and photo-induced hydrophilicity of the thin fi lms with a wide range of compositions from WO3, Ti-W-O series to TiO2. Ti doping alters the phase of the WO3 matrix. Similarly, doping of W into the TiO2 matrix results in the formation of anatase-TiO2,rutile-TiO2, or anatase/rutile mixed phases. The fi lms with appropriate compositions and annealing can become super-hydrophilicity with a water contact-angle of 3° after photon illumination. |
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