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題名 | 半導體設備之渦輪分子真空泵浦模態測試與振動分析=Vibration Characteristics Analysis and Modal Testing of a Semiconductor Equipment Turbo-molecular Vacuum Pump |
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作者 | 許智能; 黃裕盟; 傅英嘉; 蔣小偉; 徐國勛; 黎兆桓; | 書刊名 | 真空科技 |
卷期 | 24:1 2011.03[民100.03] |
頁次 | 頁15-22 |
分類號 | 446.74 |
關鍵詞 | 渦輪分子真空泵浦; 轉子軸承; 模態; 臨界轉速; Turbomolecular vacuum pump; Rotor-bearing; Mode shape; Critical speed; |
語文 | 中文(Chinese) |
中文摘要 | 本研究以數值分析及實驗研究方法,針對垂直立式之渦輪分子真空泵浦轉子軸承系統進行模態測試與振動特性分析研究探討。數值分析以有限元素法分析軟體 ANSYS 和轉子動力學分析軟體 DyRoBeS 建立轉子系統二維及三維模型,利用不同邊界條件下之靜態模態測試結果來修正及驗證轉子軸承系統之有限元素模型,再進一步計算轉子系統之坎貝圖 (CampbellDiagram),以了解轉子軸承系統之動態特性。實驗分為靜態和動態量測兩部分,靜態量測得轉子軸承系統之自然頻率,動態量測得系統之瀑布圖 (Waterfall),由瀑布圖可發現泵浦系統從 0rpm 升至工作轉速 51,600rpm 過程中會遇見工作之臨界轉速,可確保泵浦系統工作轉速可避開臨界轉速之 10% 以外的安全範圍。最終將分析與實驗結果做比對驗證,以確認分析之正確性,而完成建立一套渦輪分子真空泵浦轉子軸承系統的分析模型和轉子臨界轉速相對於軸承剛性的關係,以提供廠商在泵浦轉子開發及軸承匹配上之參考及設計依據。 |
英文摘要 | This research is focused on the dynamic characteristics of a vertical turbomolecular vacuum pump rotor-bearing system. The research methods can be divided into two parts, which are numerical analysis and experimental measurements. In numerical analysis, we have been used the fi nite element analysis software ANSYS and DyRoBeS to construct a two-dimensional and three-dimensional model of the rotor-bearing system. In the analysis process, by constantly changing the pump system assembly methods we can correct and verify the rotor-bearing system fi nite element model under different boundary conditions. Next, we can be calculated the Campbell diagram to understand the dynamic characteristics of the rotor-bearing system, and to compare with the experimental results to verify the model. Finally, we can be found the relationship between the rotor critical speed and the bearing stiffness in order to provide the design of the molecular pump rotor and the bearing system.Experimental measurements were divided into two parts: static percussion tests and dynamic measurements.Static test can provide the natural frequencies of the rotor-bearing system. Waterfall diagram of the dynamic test can be measured the pump system' s critical speed from zero speed up to the working speed crossing, and to insure that the pump working speed is far from the critical speed of 10% in the safe range. In summary, the results of the experimental measurements and numer ical analysis can be applied the basis for the design of the turbomolecular vacuum pump rotor-bearing system analysis techniques in order to identify and prevent pump vibrations. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。