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題 名 | Oxygen Effects on the Tribology and Corrosion Resistance of AlTiN/CrN Multilayered Coating by Cathodic Arc Deposition Process=氧氣對陰極電弧沉積AlTiN/CrN多層膜在抗磨潤和腐蝕上的影響 |
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作 者 | 何偉友; 薛旭宏; 楊淙顯; 張奇龍; 汪大永; | 書刊名 | 明道學術論壇 |
卷 期 | 5:1 2009.06[民98.06] |
頁 次 | 頁99-108 |
分類號 | 440.2 |
關鍵詞 | 陰極電弧沉積; 氮化鋁鈦/氮化鉻多層薄膜; 磨耗; Cathodic arc deposition; AlTiN/CrN multilayered coating; Wear; |
語 文 | 英文(English) |
中文摘要 | 氮化鋁鈦/氧化鉻((Ti, Al)N/CrN)薄膜具有良好的硬度、熱穩定性和化學安定性,其原因係由於多元合金和奈米厚度的超晶格結構。為了進一步改善(Ti, Al)N/CrN薄膜在工業上耐磨和腐蝕之應用,本研究採取通入氧氣方式以陰極電弧沉積(Ti, Al)N/CrN多層膜。研究之薄膜是利用Al 0.67 Ti 0.33和Cr為靶材,並通入氧氣和氮氣混合氣體形成塗層。由結果顯示,(Ti, Al)N/CrN多層膜與單獨之(Ti, AI)N、CrN薄膜之結構相同,為B1 NaCl類型結構。利用X光光電子光譜儀分析可確認Al2O3的形成,主要是藉由氧與鋁之化學反應。AlTiN/CrN薄膜和AlTiN塗層相較之下,氧的增加降低摩擦係數。在1M H2SO4下溶液的Potentistat極化曲線分析,與AlTiN/CrN比較之下,氧加入AlTiN/CrN之多層膜改良了抗腐蝕的塗層。其結果顯示,氧對AlTiN/CrN之耐腐蝕性確有改善之作用。 |
英文摘要 | (Ti, Al)N/CrN coatings possess superior hardness, good thermal and chemical stability due to both multi-component constituents and a superlattice structure in nanoscale thickness. To further improve wear and corrosion resistance of (Ti, Al)N/CrN multilayered coatings for industrial applications, the addition of oxygen into the (Ti, Al)N/CrN multilayered coatings by cathodic arc deposition was investigated. The studied coatings were obtained with dual Al0.67Ti0.33 and Cr targets at the O2 and N2 mixtured gas flows in this study. The structure of the coating was explored with B1 NaCl type structure in which TiAlN and CrN formed multilayer in the coating. The formation of Al2O3 by introducing oxygen to react with Al was confirmed by X-ray photoelectron spectroscopy. The lower friction coefficient of oxygen-added AlTiN/CrN coating was obtained compared to that of AlTiN coating. The polarization tests were evaluated using potentistat measurement under 1 M H2SO4 solution. Compared to AlTiN/CrN, the addition of oxygen into AlTiN/CrN multilayered coatings improved the corrosion resistance. The performance of corrosion resistance is dramatically enhanced as a result of oxygen content Oxygen Effects on the Tribology and Corrosion Resistance of AlTiN/CrN multilayered Coating by Cathodic Arc Deposition Process in the AlTiN/CrN multilayered coatings. |
本系統中英文摘要資訊取自各篇刊載內容。