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題 名 | 離子束濺鍍TiO[feaf]-SiO[feaf]混合膜製作雷射陀螺儀鏡片特性之研究=Characteristics of Ring Laser Gyroscope Mirror with Ion-Beam-Sputtered TiO[feaf]-SiO[feaf] Mixed Films |
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作 者 | 王文祥; | 書刊名 | 新新科技年刊 |
卷 期 | 3 2007.01[民96.01] |
頁 次 | 頁258-265 |
分類號 | 448.59 |
關鍵詞 | 雷射陀螺儀; 離子束濺鍍技術; 原子力顯微鏡; Ring laser gyroscope; Ion beam sputtered; Atomic force microscope; |
語 文 | 中文(Chinese) |
中文摘要 | 降低高反射率雷射鏡片的光學損耗,可提升雷射陀螺儀的導航精度。實驗過程,使用離子束濺鍍參混17% SiO₂的TiO₂-SiO₂混合膜,當高折射係數層薄膜材料,製作雷射鏡片。實驗結果顯示,使用TiO₂-SiO₂混合膜初製完成雷射鏡片,相較於傳統以TiO₂純膜當高折射係數層薄膜材料的鏡片,其總光學損耗,降低34%,並可承受400°C高溫,24小時的退火,仍能維持非晶形平滑膜面,退火後其總光學損耗相較於初製成的雷射鏡片,可再降達88%。此外,退火後的混合膜雷射鏡片,以高功率1064nm Nd-YAG雷射測試,其雷射損害臨界值大於6.37 KJ/cm²,都較未退火的混合膜鏡片,及以TiO₂純膜當高折射係數膜層材料的鏡片為高。 |
英文摘要 | Reduction of optical loss for dielectric high reflectance mirror can promote the navigation accuracy of ring laser gyroscope. In experimental proceeding, the ion-beam-sputtered TiO₂-SiO₂ mixed films with 17% SiO₂ were used as high refractive index layers in a multi-layer stack dielectric mirror. Expermental results indicated the total loss of the as-deposited mirror with mixed films was 34% lower than that of the mirror with pure TiO₂ film used as the high refractive index layers, and can sustain 400°C annealing temperature for 24h of annealing time still with smooth amorphous surface. After annealing, the total loss of the mirror wit the mixed films decreased 88% of the as-deposited value. Laser damage threshold for the annealed mirror with mixed films was above 6.37KJ/cm and was higher than the as-deposited mirror and the mirror with pure films under high power 1064nm Nd-YAG laser testing. |
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