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題 名 | Numerical Simulation of Thermal and Microdefect Distributions Effected by Different Types of Heat Shields During the Czochralski Silicon Crystal Growth=以數值模擬分析熱遮罩外型對柴式生長矽單晶中熱流及缺陷分佈之影響 |
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作 者 | 陳志臣; 陳炳忠; 胡凡勳; | 書刊名 | 中國機械工程學刊 |
卷 期 | 26:1 民94.02 |
頁 次 | 頁87-97 |
分類號 | 448.552 |
關鍵詞 | 柴式; 生長; 矽單晶; Heat Shield; Defect equation; Czochralski method; |
語 文 | 英文(English) |