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題 名 | 微細加工技術之微型壓力感測器=Micro-fabrication of Micro Pressure Sensor |
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作 者 | 陳育堂; 陳維亞; 廖顯大; | 書刊名 | 德霖學報. 理工類 |
卷 期 | 16 2002.06[民91.06] |
頁 次 | 頁1-8 |
分類號 | 471.3 |
關鍵詞 | 微機電系統; 電容式壓力感測器; 壓阻式感測器; Micro electro-mechanical systems; Micro capacitive pressure-sensor; Piezoresistance pressure-sensor; |
語 文 | 中文(Chinese) |
中文摘要 | 隨著人類社會文明的進步、生活品質提升,各項高科技產業技術隨之突飛猛進,其中尤以資訊科技的進步更是一日千里,而業界間的商業競爭更使得半導體製程技術臻於成熟。伴隨著半導體製程科技所發展的微機電系統(micro electro-mechanical systems;MEMS)技術於近年來亦廣受重視。這一領域的技術突破,使新興的矽質感測器具有尺寸小,成本低,可靠度佳等特性,因而大量的取代體積大,材料昂貴的舊型感測器。如矽質壓阻式感測器和電容式壓力感測器等的發展。本文主要介紹電容式壓力感測器結構與壓阻式感測器比較。 |
英文摘要 | High-tech manufacturing technologies, especially the information technology, have been greatly improved with the progress of human civilization as well as the rising quality of our living standard. The competition in the industry has enhanced the semi-conductor manufacturing technology. Therefore, the micro electro-mechanical systems (MEMS) have been widely researched. This enhancement of the technology directs the modern micro silicon sensor towards to be smaller, less costly and more reliable, such as micro capacitive pressure-sensor and piezoresistance pressure-sensor, in replacing the traditional ones. The comparison of structures and characteristics in between the micro capacitive pressure-sensor and the piezoresistance pressure-sensor is fully discussed in this study. |
本系統中英文摘要資訊取自各篇刊載內容。