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題名 | 利用計算流體力學軟體模擬分析無塵室之流場與微塵粒子的關係以提高產品良率之研究=Use Computational Fluid Dynamics Software to Simulate and Analyze the Relationship between the Flow Field and Airborne Particle for Improving Yield of Products |
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作者 | 魏慶華; 黃忠仁; 陳浩平; Wei, Ching-hua; Huang, Jong-zen; Chen, Hao-ping; |
期刊 | 南臺科技大學學報 |
出版日期 | 20021200 |
卷期 | 27 2002.12[民91.12] |
頁次 | 頁61-69 |
分類號 | 441.646 |
語文 | chi |
關鍵詞 | 無塵室; 計算流體力學; 微塵粒子; Clean room; Computational fluid dynamics; Particle; |
中文摘要 | 本研究將對於已知的無塵室(clean room)運轉之數據進行分析,以評估其是否合乎無塵室運轉規範 (Federal Standard 209D),並且依據相同的已知運轉條件,使用商用計算流體力學軟體(CFDRC),對於無塵室內環境的流場進行模擬與分析,以瞭解流體流動的方向與趨勢,進而提供建議,使產品作業之生產線儘可能的避開不佳的流場區域,以避免因為微塵粒子 (Panicle)的因素導致產品良率降低的可能性。 |
英文摘要 | Under the given operational conditions of the present clean room, it was first investigated whether the clean room was properly operated and satisfied with the Federal Standard 209D of clean room. Secondly, the fluid flow field of the clean room was simulated by using the Computational Fluid Dynamics software (CFDRC) under the same operational conditions. The results are very helpful for understanding the direction of the fluid flow and the relation with airborne particles. Finally, we suggested a better area to set up production lines, where would have better flow conditions to avoid airborne particles. It was expected to promote yield of products. |
本系統之摘要資訊系依該期刊論文摘要之資訊為主。