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題 名 | 五氧化二鉭光學薄膜微觀結構與沉積能量之關係=Ta[feaf]O邚Optical Thin Film Microstructure and Deposition Energy |
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作 者 | 黃承揚; 朱正煒; | 書刊名 | 真空科技 |
卷 期 | 16:4 2004.04[民93.04] |
頁 次 | 頁28-35 |
分類號 | 472.16 |
關鍵詞 | 微觀結構; 電子槍蒸鍍; 離子輔助系統; 反應磁控濺鍍; 離子束濺鍍; Microstructure; Evaporation; Ion assisted deposition; Magnetron reactive sputtering; Ion beam sputtering; |
語 文 | 中文(Chinese) |