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題 名 | 微機電系統元件之微/奈米磨潤問題=Micro/Nanotribology Issues in the MEMS Devices |
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作 者 | 方治國; | 書刊名 | 中華技術學院學報 |
卷 期 | 26 2003.04[民92.04] |
頁 次 | 頁1-11 |
分類號 | 448.57 |
關鍵詞 | 微機電系統; 摩擦; 磨耗; 潤滑; 微型元件; MEMS; Tribology; Friction; Wear; Lubrication; Micro devices; |
語 文 | 中文(Chinese) |
中文摘要 | 雖然表面微細加工技術近年已有相當程度的進展,然而摩擦、黏附、及磨耗現象仍為微機電系統元件之關鍵問題,嚴重影響其可靠度,因而限制了微機電系統之實用化。本文討論近年來關於微機電系統摩擦及磨耗之研究、探討影響此系統摩擦行為之表面效應、比較微小尺寸與巨觀尺寸摩擦特性之差異、並探討機電系統元件之減磨策略。 |
英文摘要 | Despite much progress in surface micromachining technology, friction, adhesion, and wear remain key issues, severely limiting the realization and reliability of many microelectromechanical systems (MEMS) devices. Recent researches on friction and wear in MEMS were reviewed and discussed in this paper. The surface effects influencing the frictional behavior in MEMS were discussed. The friction properties for micro and macro scales were compared. The methods to reduce the friction and wear in MEMS were also discussed. |
本系統中英文摘要資訊取自各篇刊載內容。